FS SYSTEM

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장비소개

FS SYSTEM

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제어 unit

SPECIFICATION
구분 항목 기능 / 성능 / 규격
Laser Gain Medium Yb:KGW
Wavelength [nm] 1,030
Average Power [w] 10
Pulse Energy [mj] Max 0.2
Repetition Rate 1 Hz~ 200 kHz
Pulse Width 240fs~10ps(Tunable)
Beam Quality M² < 1.2
Output Pulse Stability < 1% RMS
Stage Type X Y Z (LM Guide Linear)
Processing Speed [mm/s] Up to 300
Working Field Area [mm] 500 x 500
Resolution [nm] 10
Positioning Accuracy [nm] ± 300
Repeatability [nm] ± 50
In Position Stability [nm] 30
Sample Holder Vacuum Chuck, Porous Chuck
Scanner
(4f System)		 Galvanometer Scanner Up to 3mm/s Scanning Speed
Scanning Field [mm] Max 2 x 2
Focusing Optics F-theta Lens
Objective Lens Focusing Lens High NA Lens (5X / 10X /20X / 50X / 100X)
Coaxial Vision Dichronic Mirror
CCD Camera [pixel] 1280 x 960
Harmonics SH (515nm), FH (257nm) Conversion Efficiency – 50% (SH), 10%(FH)
Software Control Power Control Motorized Attenuators
Positioning Stage Control 2.5D Micromachining, 3D XYZ Command
OS Windows 10
Work Station Size (W x D x H, m) 1.2 x 1.8 x 2
Weight [kg] 1,500
Spot Size Diameter [μm] 2 ~ 20
QCW FIBER LASER SYSTEM (250W)

SPECIFICATION
구분 항목 기능 / 성능 / 규격
Laser Operation Mode Pulsed / CW
Average Power Pulsed (150W) / CW (250W)
Pulse Duration [ms] 0.05 ~ 50
Max Pulse Energy [J] 15
Wavelength [nm] 1070
Long-term Power Stability [%] ± 1
Stage Type X Y Z (LM Guide Linear)
Processing Speed [mm/s] Up to 300
Working Field Area [mm] 300 x 300
Resolution [nm] 10
Positioning Accuracy [nm] ± 300
Repeatability [nm] ± 50
In Position Stability [nm] 30
Spot Size Diameter [μm] 50 ~ 100
Work Station Size (W x D x H, m) 1.5 x 1.7 x 2
Weight [kg] 800
NANO SECOND FIBER LASER (20W)

SPECIFICATION
구분 항목 기능 / 성능 / 규격
Laser Average Power [W] 20
Wavelength [nm] 1064
Pulse Width [ns] 10, 20, 30, 50, 75, 100, 150, 200
Multi-pulse profiles 2, 3, 5, 7 x 10, 7 x 30
Repetition Rate 1 Hz ~ 500kHz
Max Pulse Energy [mJ] 0.6
Power Stability [%] ± 5
Beam Quality (M²) 1.3
Scanner Galvanometer Scanner Up to 3mm/s Scanning Speed
Scanning Field [mm] Max 100 x 100
Focusing Optics F-theta Lens
Focal Length [mm] 100
Spot Size Diameter [μm] 50 ~ 100
Work Station Size (W x D x H, m) 0.5 x 1.2 x 0.6
Weight [kg] 100
CO2 LASER (70W)

본체

제어 unit

SPECIFICATION
구분 항목 기능 / 성능 / 규격
Laser Average Power [W] 70
Wavelength [µm] 10.55 to 10.65
Beam Size [mm] 3.6 ± 0.5
Beam Divergence [mRad] < 5
Power Stability [%] ± 5
Beam Quality (M²) 1.3
Scanner Galvanometer Scanner Up to 3mm/s Scanning Speed
Scanning Field [mm] Max 100 x 100
Focusing Optics F-theta Lens
Focal Length [mm] 100
Stage Type X Y Z
Processing Speed [mm/s] Up to 100
Working Field Area [mm] 1,000 x 1,000
Spot Size Diameter [μm] 50 ~ 100
Work Station Size (W x D x H, m) 1.5 x 1.3 x 1.7
Weight [kg] 500